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Ion Implanter

IBS provides unique ion implanter solutions to service semiconductor device manufacturing and development customers. Our focus is to answer new and futures needs in niche and fast growing markets as SiC, H-Cut, III/V and to provide solutions to replace obsolete equipment for mature markets. Our family of products consists in: FLEXion**: Medium Current ion implanter platform for 4"-8" wafers, offering optimized process window, high energy up to 400keV and enhanced productivity for SiC and other III/V applications; MAXion**: High Current ion implanter platform for 4"-8" wafers, offering high energy capability up to 210keV, and enhanced productivity for H-Cut applications as well as mature Si device doping; PULSion**: A Plasma Immersion Ion Implanter (PIII) platform for up to 12" wafers, offering very low energy, very high dose and 3D doping capabilities, for shallow doping, material modifications and trench/fin doping applications IMC**: Fully customizable Ion Implanter for R&D, process development, or low volume production for up to 6" wafers (8" as option). Clink here for ion implanter enquiry

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Manpower Services

IBS provides a full range of manpower services to support your ion implanter needs: * Audit * Installation * Decommissioning * Relocation * Preventive Maintenance * Corrective Maintenance * Service Contracts IBS manpower consists of highly qualified and experienced engineers.

Price Available on Request

Mechanical refurbishment

IBS offers refurbishment services for ion implanter mechanical assemblies. These include: * ESC * HYT particle counter * Disks and heat sinks * roplat & tilter * Robot Service allows full refurbishment even in case of severe failure, and include enhancements that solves product obsolescence and enhance equipment process or operation.

Price Available on Request

Ion implanter upgrades

IBS provides solutions to upgrade your existing ion implanter to increase productivity, enhance or extend process capability, and solve parts obsolescence. Available upgrades include ion source, dopant delivery, wafer platen, power supply, ion gage, motors and controllers.

Price Available on Request

Doping services

IBS provides ion implant services for R&D, process development and volume manufacturing. IBS is the word's most specialized and flexible ion implant foundry, providing ion implant foundry services for: * any substrate size : 2-12" wafers, other samples or geometry * any substrate material: Si, SiC, GaN, GaAs and any material * any dopant from more than 65 different species available * any dose and energy process window: Medium Current, High Current, Plasma Doping, High Energy ion implanter platforms available for foundry services IBS has 3 ion implant service centers with 12 ion implanters, and has capability for volume manufacturing with flexible manufacturing up to 24/7, as well as rush service available as an option. Click here to let us know more about your enquiry.

Price Available on Request

Parts & Consumables

IBS provides spare parts and consumables parts for various ion implanter models. Spare part availability is subject to stock level and may consist of either new, refurbished or used parts, OEM or second source.

Price Available on Request

Electronic repair

IBS provides high quality repair services for ion implanter electronics from most OEM brands. Repair capability includes the following: * High Voltage power supplies * DC power supplies * Controllers * DI boards IBS provides audit, repair, obsolete component replacement, and testing, allowing high repair yield.

Price Available on Request

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Ion Implant Equipment, Services & Foundry

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