ibs asia

innovative ion implant

Agency based in Singapore

Ion Implant Equipment, Services & Foundry

Ion Implanter

IBS provides unique ion implanter solutions to service semiconductor device manufacturing and development customers. Our focus is to answer new and futures needs in niche and fast growing markets as SiC, H-Cut, III/V and to provide solutions to replace obsolete equipment for mature markets. Our family of products consists in: FLEXion**: Medium Current ion implanter platform for 4"-8" wafers, offering optimized process window, high energy up to 400keV and enhanced productivity for SiC and other III/V applications; MAXion**: High Current ion implanter platform for 4"-8" wafers, offering high energy capability up to 210keV, and enhanced productivity for H-Cut applications as well as mature Si device doping; PULSion**: A Plasma Immersion Ion Implanter (PIII) platform for up to 12" wafers, offering very low energy, very high dose and 3D doping capabilities, for shallow doping, material modifications and trench/fin doping applications IMC**: Fully customizable Ion Implanter for R&D, process development, or low volume production for up to 6" wafers (8" as option). Clink here for ion implanter enquiry

Price Available on Request

Manpower Services

IBS provides a full range of manpower services to support you ion implanter needs: * Audit * Installation * Decommissioning * Relocation * Preventive Maintenance * Corrective Maintenance * Service Contracts IBS manpower consists of highly qualified and experienced engineers.

Price Available on Request

Mechanical refurbishment

IBS offers refurbishment services for ion implanter mechanical assemblies. These include: * ESC * HYT * Disks and heat sinks * roplat & tilter * Robot Service allows full refurbishment even in case of severe failure, and include enhancements that solves product obsolescence and enhance equipment process or operation.

Price Available on Request

Ion implanter upgrades

IBS provides solutions to upgrade your existing ion implanter to increase productivity, enhance or extend process capability, and solve parts obsolescence. Available upgrades include ion source, dopant delivery, wafer platen, power supply, ion gage, motors and controllers.

Price Available on Request

Doping services

IBS provides ion implant services for R&D, process development and volume manufacturing. IBS provides is the word's most specialized and flexible ion implant foundry, providing ion implant foundry services for: * any substrate size : 2-12" wafers, other samples or geometry * any substrate material: Si, SiC, GaN, GaAs and any material * any dopant from more than 65 different species available * any dose and energy process window: Medium Current, High Current, Plasma Doping, High Energy ion implanter platforms available for foundry services IBS has 3 ion implant service centers with 12 ion implanters, and has capability for volume manufacturing with flexible manufacturing up to 24/7, as well as rush service available as an option. Click here to let us know more about your enquiry.

Price Available on Request

Parts & Consumables

IBS provides spare parts and consumables parts for amin ion implanter models. Spare part availability is subject to stock level and may consist of either new, refurbished or used parts, OEM or second source.

€87OnwardsMultiple Price Plans

Electronic repair

IBS provides high quality repair services for ion implanter electronics from most OEM brands. Repair capability includes the following: * High Voltage power supplies * DC power supplies * Controllers * DI boards IBS provides audit, repair, obsolete component replacement, and testing, allowing high repair yield.

Price Available on Request

About Us

ibs asia is a 1-stop solution for ion implantation. We provide:

ion implanter equipment for applications like H-cut, SiC, III/V, 3D doping, advanced semiconductor manufacturing and R&D purpose;
ion implanter equipment services for equipment including parts, repairs, upgrades and manpower solutions, that allow productivity improvement, cost reduction and extension of asset durability;
ion implantation and other wafer process services, that enable research, development and production of semiconductor devices or other materials.

Featured Clients

Semi Conductor Laboratory

Infineon Technologies (Kulim) Sdn. Bhd

United Microelectronics Corporation (Singapore Branch)

Solutions

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Self Project

Viista / Trident ESC refurbishment

Viista ESC refurbishment ...

Ongoing Project

ESC Refurbishment

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Self Project

E500 IHC source upgrade

Ongoing Project

ion source

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Self Project

9500xR IHC source upgrade

Ongoing Project

ion source ion implanter Upgrade

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TSMC

Viision IHC source upgrade

TSMC is a world largest semiconductor chip manufacturer. It runs more than 20 factories in Taiwan and rest of the word. As a semiconductor foundry, it is constantly focusing on productivity improvement and cost reduction for its manufacturing process. For its Viision ion implanter installed base of more than 10 tools, TSMC was looking at improving the ion source lifetime and increasing the beam current for its major manufacturing process recipes. Based on a similar development tested for another customer in Europe, IBS has delivered and qualified upgrade kits and demonstrated source lifetime of up to 4x the initial performance. IBS upgrade kits allow very quick installation time and reversible upgrade operation that allow customers to ensure full process qualification of the solution while minimizing the manufacturing impact. TSMC has now upgraded all their Viision equipment with IBS kits in Taiwan, and most of Viision tools in factories outside Taiwan.

July, 2015

Upgrade ion implanter ion source

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